EFEM (Equipment Front End Module)设备前端模块
An EFEM is an equipment-side module that handles wafers between their carriers and the next stage of tool handling. A configuration can include load ports, a wafer-handling robot and an aligner. Check the equipment drawing for the boundary of the specific module.
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Where this term appears
In a Chinese service manual, use the source drawing and parts list to map the full module, its assemblies and the interface to the next handling stage. Carry the same component names into the alarm list and any separate maintenance instructions.
Translation checks
The “front end” in EFEM identifies the module’s place in the equipment. It does not refer to front-end wafer fabrication or front-end software. When the manual calls out a load port or an aligner, retain that narrower component reference.
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Related document experience
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SMIC (Semiconductor Manufacturing International)
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