Etching刻蚀
Etching is a controlled material-removal process used in semiconductor manufacturing to selectively remove dielectric, metal, or silicon layers from a wafer while protected areas remain untouched, effectively transferring the lithographic pattern into the underlying film. In fabrication documentation, etching appears in process flow specifications, etch tool recipes, post-etch inspection criteria, and defect reduction reports where it is described alongside lithography, deposition, and metrology steps.
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Where this term appears
In translation and localization, etching terminology appears in equipment manuals, process specifications, EHS documents, quality control procedures, and failure analysis reports. Translators encounter it when localizing fab engineering documents, operator training material, supplier quality agreements, and corrective action records where wet etch, dry etch, plasma etch, and etch selectivity must be distinguished accurately.
Translation checks
A common error is translating etch as 'corrosion' or 'engraving' in process documents, which obscures the controlled patterning purpose and could be mistaken for unintended material damage. Another mistake is using the same target term for wet etch and plasma etch without indicating the method; this can mislead engineers because selectivity, isotropy, and tool requirements differ significantly.
Keep the term aligned across your files
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Provide approved terms and previous translations with the source files. Agree how variants, ambiguous wording and revisions will be reviewed. Terminology maintenance and any termbase handback are confirmed in the project scope. See the 8-step AI + expert workflow.
Related document experience
Torex Semiconductor
Japanese → ChineseJapanese-to-Chinese documentation for a listed Japanese semiconductor manufacturer.
Read the published project →
SMIC (Semiconductor Manufacturing International)
English ⇄ ChineseCorporate reporting and disclosure documentation, delivered across successive annual cycles.
Read the published project →Published scope shows related industry experience; it does not confirm that this specific term was used or reviewed in the project.
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