Metrology量测
Metrology in semiconductor manufacturing is the precision measurement of critical dimensions, film thickness, overlay, and other structures to monitor routine process control, detect variation, and verify process windows that affect device performance. In fabrication documentation, it appears in inspection plans, statistical process control charts, tool calibration records, yield reports, and excursion investigations linked to lithography, etch, deposition, and CMP steps.
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Where this term appears
Metrology appears in localization of process control plans, equipment manuals, yield management presentations, and supplier audit checklists. Translators encounter terms like overlay metrology, CD metrology, film metrology, and scatterometry. They must differentiate measurement from inspection and avoid vague quality terms that hide the quantitative nature of the data and measurement uncertainty.
Translation checks
A common mistake is translating metrology as 'measurement' in all contexts, which can lose the specialized infrastructure, tooling, and process control meaning. Another error is using 'meteorology' due to spelling similarity. In process specifications, such mistakes can make calibration and inspection documents appear very non-technical, ambiguous, or incorrect in scope.
Keep the term aligned across your files
Technical terms need checking against the source, approved product terminology and related specifications. Keep units, parameter conditions and document versions aligned across the file set.
Provide approved terms and previous translations with the source files. Agree how variants, ambiguous wording and revisions will be reviewed. Terminology maintenance and any termbase handback are confirmed in the project scope. See the 8-step AI + expert workflow.
Related document experience
Torex Semiconductor
Japanese → ChineseJapanese-to-Chinese documentation for a listed Japanese semiconductor manufacturer.
Read the published project →
SMIC (Semiconductor Manufacturing International)
English ⇄ ChineseCorporate reporting and disclosure documentation, delivered across successive annual cycles.
Read the published project →Published scope shows related industry experience; it does not confirm that this specific term was used or reviewed in the project.
Working on semiconductor documentation?
Include the source and target languages, file types, intended use, deadline and any approved termbase. Agree handling before sending sensitive files. Acknowledged in 4 hours, quoted in 24.
Prepare an inquiry email →Semiconductor solutions →File handling →A glossary entry is not an official standard or evidence of regulatory acceptance. Confirm current requirements for your project separately.