Critical Dimension关键尺寸
Critical dimension (CD) is the smallest feature size or linewidth that a fabrication process must control to achieve the intended electrical performance, typically specified in nanometers and measured after lithography or etch. In semiconductor documentation it appears in process specifications, metrology reports, statistical process-control charts, and design-rule checks where CD uniformity, bias, and target offsets are closely tracked.
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Where this term appears
Critical dimension appears in process specifications, metrology recipes, OPC models, and design-rule documents. Translators encounter it when localizing fab measurement instructions, CD-SEM tool user interfaces, statistical process-control reports, and quality records, where CD values, target offsets, and uniformity metrics must remain numerically and terminologically consistent with source images.
Translation checks
A common mistake is expanding CD as compact disk or glossing it as critical distance, which is wrong in semiconductor metrology. Another issue is translating the abbreviation inconsistently with the full term, causing confusion in recipes and user interfaces where CD, linewidth, and target offset must correspond exactly to the drawings and data.
Keep the term aligned across your files
Technical terms need checking against the source, approved product terminology and related specifications. Keep units, parameter conditions and document versions aligned across the file set.
Provide approved terms and previous translations with the source files. Agree how variants, ambiguous wording and revisions will be reviewed. Terminology maintenance and any termbase handback are confirmed in the project scope. See the 8-step AI + expert workflow.
Related document experience
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SMIC (Semiconductor Manufacturing International)
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Read the published project →Published scope shows related industry experience; it does not confirm that this specific term was used or reviewed in the project.
Working on semiconductor documentation?
Include the source and target languages, file types, intended use, deadline and any approved termbase. Agree handling before sending sensitive files. Acknowledged in 4 hours, quoted in 24.
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