Optical Proximity Correction光学邻近校正
Optical proximity correction (OPC) is a computational lithography step that modifies photomask geometries—adding serifs, biasing edges, or creating sub-resolution assist features—so that diffraction and resist effects do not distort the printed pattern. In mask data preparation and DFM documentation, OPC sits after design rule checking and before mask writing, and is essential for maintaining critical dimension fidelity in advanced process nodes.
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Where this term appears
OPC appears in mask synthesis manuals, DFM rule decks, and lithography process documentation. Translators encounter it in OPC script parameters, mask data prep menus, correction layer descriptions, and signoff reports that discuss critical dimension and overlay budgets. The term often sits alongside photomask, reticle, and lithography settings, and consistent rendering is needed in user interface labels.
Translation checks
A common mistake is translating OPC as '光学接近校正' or '光学邻近修正' inconsistently, or using '修正' for both correction and repair. More importantly, translators sometimes omit 'optical' or render 'proximity' as '近距离', losing the diffraction context. In mask data prep UI, inconsistent terminology can lead to wrong layer or script selection. This is especially costly in tape-out flows.
Keep the term aligned across your files
Technical terms need checking against the source, approved product terminology and related specifications. Keep units, parameter conditions and document versions aligned across the file set.
Provide approved terms and previous translations with the source files. Agree how variants, ambiguous wording and revisions will be reviewed. Terminology maintenance and any termbase handback are confirmed in the project scope. See the 8-step AI + expert workflow.
Related document experience
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SMIC (Semiconductor Manufacturing International)
English ⇄ ChineseCorporate reporting and disclosure documentation, delivered across successive annual cycles.
Read the published project →Published scope shows related industry experience; it does not confirm that this specific term was used or reviewed in the project.
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