Semiconductor · 半导体

Stepper步进光刻机

A stepper is a lithography tool that projects a reticle pattern onto one exposure field of a wafer while the stage holds the field stationary, then moves the wafer to the next field and repeats the process. In semiconductor manufacturing documentation, it appears in process flow descriptions, equipment specifications, and maintenance or calibration records where lithography steps and alignment are defined.

Where this term appears

In translation and localization, stepper appears in lithography equipment manuals, wafer fab standard operating procedures, process specifications, and operator training materials. It also shows up in recipe management software strings, maintenance checklists, and alarm or event logs where the exposure tool type must be identified clearly. The term frequently occurs in English source content produced by equipment vendors and is translated for fabs in Chinese, Japanese, or Korean.

The mistake that shows up most often

A common error is translating stepper as 'stepping machine' or '步进机' without the lithography context, which makes it sound like a generic motorized stage. Another error is conflating it with scanner; in older stepper documentation, the reticle and wafer are stationary during exposure, so using terms associated with scanning lithography can distort process limits.

Why consistent rendering matters

Terminology must stay consistent across datasheets, design kits and patent filings. A single inconsistent parameter can propagate into fabrication decisions or weaken a patent claim, and IP confidentiality applies to every document in the chain.

Angel Translation locks terms like this into a project terminology base before expert review begins, so the same source term resolves to the same target term across every document in a submission — and stays consistent in the next revision. See the 8-step AI + expert workflow.

EnglishStepper
简体中文步进光刻机
DomainSemiconductor

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